Soo saarista 6N (≥99.9999% daahirnimo) oo aad u sarreysa waxay u baahan tahay kala-soocid marxalado badan leh, nuugid qoto dheer, iyo sifeyn aad u nadiif ah si loo baabi'iyo biraha raadadka ah, wasakhda dabiiciga ah, iyo walxaha wasakhda ah. Hoos waxaa ku yaal hab warshadeed oo isku dhafan kala-soocid faakiyuum ah, sifeynta lagu caawiyo microwave-ka, iyo teknoolojiyada saxda ah ee daaweynta kadib.
I. Daaweynta Kahor iyo Ka Saarista Wasakhda
1. Xulashada Walxaha Cayriin iyo Daaweynta Kahor
- ?Shuruudaha: Nadiifnimada salfarta bilowga ah ≥99.9% (heerka 3N), wadarta wasakhda birta ≤500 ppm, kaarboon dabiici ah ≤0.1%.
- ?Dhalaalidda Microwave-ka oo Ka Caawinaysa:
Sulfur cayriin ah ayaa lagu farsameeyaa fal-galiye microwave ah (2.45 GHz soo noqnoqoshada, 10-15 kW awood) heerkul ah 140–150°C. Wareegga dipole-ka ee microwave-ku keeno wuxuu hubiyaa dhalaal degdeg ah halka uu burburinayo wasakhda dabiiciga ah (tusaale ahaan, isku-darka daamurka). Waqtiga dhalaalka: 30–45 daqiiqo; qoto dheer ee gelitaanka microwave-ka: 10–15 cm - ?Dhaqidda Biyaha La Nadiifiyey:
Sulfur la dhalaaliyay waxaa lagu qasaa biyo la dhalaaliyay (iska caabin ≥18 MΩ·cm) oo leh saamiga cufka 1:0.3 ee fal-gale la kiciyay (120°C, cadaadis 2 bar ah) muddo 1 saac ah si looga saaro cusbada biyaha ku milma (tusaale ahaan, ammonium sulfate, sodium chloride). Marxaladda biyaha waa la baabi'iyaa oo dib ayaa loo isticmaalaa 2-3 wareeg ilaa uu ka sii socdo ≤5 μS/cm.
2. Ku-dhalashada iyo Shaandhaynta Marxaladaha Badan
- ?Dhul Diatomaceous ah/Nooca Kaarboonka ee Firfircoon:
Dhulka diatomaceous (0.5–1%) iyo kaarboon firfircoon (0.2–0.5%) ayaa lagu daraa sulfur dhalaalay iyadoo la ilaalinayo nitrogen (130°C, walaaqid 2-saacadood ah) si loo nuugo isku-dhafka birta iyo haraaga organic-ga. - ?Shaandhaynta Aad u Saxsan:
Shaandheyn laba-marxal ah oo la adeegsanayo shaandheeyayaasha titanium sintered (cabirka daloolka 0.1 μm) oo leh cadaadis nidaamka ≤0.5 MPa. Tirada walxaha ka dib shaandheynta: ≤10 walxood/L (cabirka >0.5 μm).
II. Habka Nadiifinta Faakuumka ee Marxaladaha Badan
1. Kala-saarista Aasaasiga ah (Ka-saarista Wasakhda Birta)
- ?QalabkaTiirka sifeynta quartz oo saafi ah oo leh 316L oo bir aan daxal lahayn ah oo baakadaysan (≥15 saxan oo aragtiyeed), faakiyuum ≤1 kPa.
- ?Halbeegyada Hawlgalka:
- ?Heerkulka quudinta: 250–280°C (suufaarku wuxuu karkaraa 444.6°C cadaadis ku jira jawiga; faakiyuumku wuxuu yareeyaa heerka karkaraya ilaa 260–300°C).
- ?Saamiga Dib-u-Celinta: 5:1–8:1; isbeddelka heerkulka sare ee tiirka ≤±0.5°C.
- ?Badeecada: Nadiifnimada sulfur ee isku dhafan ≥99.99% (darajada 4N), wadarta wasakhda birta (Fe, Cu, Ni) ≤1 ppm.
2. Kala-soocidda Molekule-ka Labaad (Ka-saarista Nadaafadda Dabiiciga ah)
- ?Qalabka: Makiinad-sameeyaha molecular-ka ee jidka gaaban oo leh farqiga uumi-baxa-codensation 10-20 mm, heerkulka uumi-baxa 300-320°C, faakiyuum ≤0.1 Pa.
- ?Kala-soocidda Naas-nuujinta:
Walxaha noolaha ee karkaraya (tusaale ahaan, thioethers, thiophene) ayaa la uumiyaa oo laga daadgureeyaa, halka wasakhda karkaraya ee aadka u badan (tusaale ahaan, polyaromatics) ay ku sii jiraan haraaga sababtoo ah kala duwanaanshaha wadada xorta ah ee molecular-ka. - ?Badeecada: Nadiifnimada sulfur ≥99.999% (heerka 5N), kaarboon dabiici ah ≤0.001%, heerka haraaga <0.3%.
3. Sifeynta Aagga Saddexaad (Gaaritaanka Nadiifnimada 6N)
- ?Qalabka: Sifeeyaha aagga toosan oo leh xakamaynta heerkulka aagagga badan (±0.1°C), xawaaraha safarka aagga 1–3 mm/saacaddii.
- ?Kala soocid:
Adeegsiga isku-dhafka kala-soocidda (K=Csolid/Cliquid)K=Cadag/Cdareere), aagga 20–30 wuxuu dhaafaa biraha xooggan (As, Sb) dhammaadka ingot. 10–15% ee ingot sulfur-ka ugu dambeeya waa la tuuraa.
III. Daaweynta Kadib iyo Samaynta Aad u Nadiifsan
1. Soo saarista dareeraha aadka u saafiga ah
- ?Soo saarista Ether/Carbon Tetrachloride:
Sulfur waxaa lagu qasaa ether-ka heerka koromotografiga (saamiga mugga 1:0.5) iyadoo la adeegsanayo caawinta ultrasonic (40 kHz, 40°C) muddo 30 daqiiqo ah si looga saaro raadadka organic-ga ee cidhifyada. - ?Soo kabashada dareeraha:
Nuugista shaandhada molecular-ka iyo nadiifinta faakuumka ayaa hoos u dhigta haraaga dareeraha ilaa ≤0.1 ppm.
2. Ultrafiltration iyo Isweydaarsiga Ion
- ?Shaandhaynta Ultrafiltering ee Xuubka PTFE:
Sulfur la dhalaaliyay waxaa lagu sifeeyaa xuubka PTFE ee 0.02 μm heerkul ah 160–180°C iyo ≤0.2 MPa. - ?Resins-ka Sarrifka Ion:
Resins-ka Chelating (tusaale ahaan, Amberlite IRC-748) waxay ka saaraan ayoonada birta heerka ppb (Cu²⁺, Fe³⁺) heerka socodka 1–2 BV/h.
3. Samaynta Deegaanka Aad u Nadiif ah
- ?Atomization-ka Gaaska aan firfircoonayn:
Qolka nadiifka ah ee fasalka 10, sulfur dhalaalay waxaa lagu dahaadhaa nitrogen (cadaadis 0.8–1.2 MPa) oo lagu daraa granules wareegsan oo 0.5–1 mm ah (qoyaan <0.001%). - ?Baakadaha Faakuumka:
Badeecada kama dambaysta ah waxaa lagu shaabadeeyaa faakiyuum iyadoo lagu shubayo filim isku dhafan oo aluminium ah iyadoo la adeegsanayo argon aad u saafi ah (≥99.9999% daahirnimo) si looga hortago oksaydheynta.
IV. Qodobbada Muhiimka ah ee Habka
| Marxaladda Geeddi-socodka | Heerkulka (°C) | Cadaadis | Waqtiga/Xawaaraha | Qalabka Aasaasiga ah |
| Dhalaalaya Microwave-ka | 140–150 | Deegaanka | 30–45 daqiiqo | Fal-sameeyaha Microwave-ka |
| Dhaqidda Biyaha La Nadiifiyey | 120 | 2 baar | 1 saac/wareeg | Fal-sameeyaha Wareejiyay |
| Kala-soocidda Molekuleeriyada | 300–320 | ≤0.1 Pa | Joogto ah | Qalabka Nadiifiyaha Molecular-ka ee Waddada Gaaban |
| Sifeynta Aagga | 115–120 | Deegaanka | 1–3 mm/saacaddii | Sifeeyaha Aagga Jiifka ah |
| Shaandhaynta Ultrafect ee PTFE | 160–180 | ≤0.2 MPa | Socodka 1–2 m³/saacaddii | Shaandheeye Heerkul Sare ah |
| Atomization-ka Nitrogen-ka | 160–180 | 0.8–1.2 MPa | 0.5–1 mm granules | Munaaradda Atomization |
V. Xakamaynta iyo Tijaabinta Tayada
- ?Falanqaynta Nadaafadda Raad-raaca:
- ?GD-MS (Spectrometry-ga Cufnaanta Dheecaanka): Waxay ogaataa biraha ≤0.01 ppb.
- ?Falanqeeyaha TOC: Waxay cabbirtaa kaarboonka dabiiciga ah ≤0.001 ppm.
- ?Xakamaynta Cabbirka Walxaha:
Kala-soocidda laysarka (Mastersizer 3000) waxay hubineysaa in D50 uu ka weecan karo ≤±0.05 mm. - ?Nadiifinta Dusha Sare:
XPS (X-ray Photoelectron Spectroscopy) wuxuu xaqiijinayaa dhumucda oksaydhka dusha sare ≤1 nm.
VI. Badbaadada iyo Naqshadeynta Deegaanka
- ?Ka Hortagga Qaraxyada:
Qalabka lagu ogaado ololka infrared-ka iyo nidaamyada daadadka nitrogen-ka ayaa ilaaliya heerarka oksijiinta <3% - ?Xakamaynta Qiiqa:
- ?Gaasaska Aashitada: Nadiifinta NaOH ee laba-marxalad ah (20% + 10%) waxay meesha ka saartaa ≥99.9% H₂S/SO₂.
- ?VOC-yada: Rotor-ka Zeolite + RTO (850°C) wuxuu yareeyaa hydrocarbons-ka aan methane ahayn ilaa ≤10 mg/m³.
- ?Dib-u-warshadaynta Qashinka:
Hoos u dhigista heerkulka sare (1200°C) waxay soo celisaa biraha; haraaga sulfur-ka <0.1%.
VII. Tiknoolajiyada-Dhaqaalaha
- ?Isticmaalka Tamarta: Koronto 800–1200 kWh ah iyo 2–3 tan oo uumi ah halkii tan oo ah 6N sulfur.
- ?Wax soo saar: Soo kabashada sulfur ≥85%, heerka haraaga <1.5%.
- ?Qiimaha: Qiimaha wax soo saarka ~120,000–180,000 CNY/ton; qiimaha suuqa 250,000–350,000 CNY/ton (heerka semiconductor).
Hawshani waxay soo saartaa 6N sulfur oo loogu talagalay sawir-qaadayaasha semiconductor-ka, substrate-ka isku-dhafka ah ee III-V, iyo codsiyada kale ee horumarsan. La socodka waqtiga-dhabta ah (tusaale ahaan, falanqaynta walxaha LIBS) iyo habaynta qolka nadiifka ah ee ISO Class 1 waxay hubiyaan tayo joogto ah.
Qoraallada hoose
- Tixraaca 2aad: Heerarka Nadiifinta Sulfurka Warshadaha
- Tixraaca 3aad: Farsamooyinka Shaandhaynta Sare ee Injineerinka Kiimikada
- Tixraaca 6: Buug-gacmeedka Habaynta Agabka Nadiifka Sare leh
- Tixraaca 8: Habraacyada Wax-soo-saarka Kiimikada ee Heerka Semiconductor-ka
- Tixraaca 5: Hagaajinta Nadiifinta Faakuumka
Waqtiga boostada: Abriil-02-2025